The following is a list of lab equipment and the primary contact person for each piece of equipmnent.
- RIE: Scott Chen, Ahmed Aziz
- PECVD: Ahmed Aziz
- E-Beam Evaporator: TBD
- Sputtering System: TBD
- Mask Aligner / Photolithography: TBD
- CO2 Dryer: Sara Attar
- HF Release Process: Siamak Fouladi
- Dektak: Scott Chen, Geoff Lee
- Electroplating System: Oliver Wong
Last Updated: 26-Jan-12