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Clean Room Facilities Links

Clean Room

SUSS MJB4 Mask Aligner

Coming Soon

Intlvac Nanochrome Deposition System

Trion Orion Plasma-Enhanced Chemical Vapour Deposition (PECVD) System

Trion Phantom Reactive Ion Etcher (RIE)

Tousimis Automegasamdri-915B, Critical Point CO2 Dryer

Logitech CDP Chemical Delayering & Planarization System

Oriel Mask Aligner

Lindberg/Blue High Temperature Furnace

Bungard Dry Film Laminator

Yellow Room (for Photolithography)

Technic 5-Tank Electroplating System

Maintenance Corridor

EFD Liquid Dispensing System